Method and apparatus for inspecting pattern defects

Details Method and apparatus for inspecting pattern defects Method and apparatus for inspecting pattern defects

2011-08-23

2011-08-23

Desire, Gregory M (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C348S087000, C348S092000, C348S126000, C356S237400, C356S237500, C382S144000, C382S195000, C382S218000, C382S224000, C700S121000

Reexamination Certificate

active

08005292

ABSTRACT:
An apparatus for inspecting pattern defects, the apparatus including: an image acquisition unit which acquires an image of a specimen and stores the acquired image in an image memory; a defect candidate extraction unit which performs a defect candidate extraction process by using the acquired image, which is read from the image memory; and a defect detection unit which performs a defect detection process and a defect classification process based on a partial image containing a defect candidate that is extracted by the defect candidate extraction unit, wherein the processes performed by the defect detection unit is performed off-line asynchronously with an image acquisition process that is performed by the image acquisition unit.

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