Electric circuit and package for semiconductor

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – For plural devices

Reexamination Certificate

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C257S531000, C257S532000

Reexamination Certificate

active

06310393

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an electric circuit and a semiconductor package capable of eliminating source noise in a semiconductor integrated circuit which performs high-speed operation.
2. Description of the Related Art
The current used in a semiconductor integrated circuit tends to increase by many times as the bus width of a semiconductor system increases from 8 bits to 16 bits, from 16 bits to 32 bits, and from 32 bits to 64 bits. Also, as the speed of the semiconductor system increases, the current change interval is shortened by several times, from 10 nsec. to several nsec. and to less than 1 nsec. As a result, recently, the change rate of the current consumed by a semiconductor device (dI/dt) has increased by several tens of times. With such an increasing current change rate, source noise tends to increase.
When an inductance exists between a ground terminal of a power supply for a semiconductor device and the power supply, voltage variation is generated in proportion to current change. This develops to source noise and becomes a cause of malfunction of the semiconductor device. In order to prevent this problem, a bypass capacitor is conventionally provided near power supply/ground terminals of a semiconductor device. This reduces the source impedance as observed from the semiconductor device and thus reduces source noise. However, in a construction where a plurality of semiconductor devices and bypass capacitors are arranged, a current flows from one semiconductor device, not only to the corresponding bypass capacitor near the semiconductor device, but also to another bypass capacitor.
FIG. 28
shows a circuit diagram showing a current flowing to a semiconductor circuit.
Referring to
FIG. 28
, the reference numerals
35
a
and
35
b
denote semiconductor devices,
36
denotes an output terminal,
37
a
and
37
b
denote bypass capacitors,
38
denotes a signal line,
39
denotes a normal current flowing to the semiconductor device
35
a,
and
40
denotes an undesirable current which may cause a variation in source potential. The current
40
generates source noise for the other semiconductor device
35
b
and becomes a cause of electromagnetic radiation from power supply/ground planes.
In order to reduce the above phenomena, TECHNICAL REPORT OF IEICE, EMCJ97-82, for example, describes a method which uses a substrate capable of reliably decoupling adjacent semiconductor devices mounted thereon from each other.
FIG. 29
illustrates this method.
Referring to
FIG. 29
, the reference numeral
35
denotes semiconductor devices,
36
denotes an output terminal,
37
denotes bypass capacitors,
38
denotes a signal line,
41
denotes decoupling coils,
42
denotes a power supply plane, and
43
denotes a ground plane.
The decoupling coil
41
is inserted between the power supply terminal of each semiconductor device
35
and the power supply plane
42
. One terminal of the bypass capacitor
37
is connected with the power supply terminal of the semiconductor device
35
, and the other terminal thereof is grounded. In this way, a high-frequency current flowing to the semiconductor device
35
is supplied from the bypass capacitor
37
disposed near the semiconductor device
35
without flowing to the power supply plane
42
.
The reason for the above is that, by the insertion of the decoupling coil
41
, an impedance Zc=1/(j&ohgr;C) on the side of the bypass capacitor
37
as observed from the semiconductor device
35
becomes lower than an impedance Ze=j&ohgr;L on the side of the power supply as observed from the semiconductor device
35
.
The larger the ratio of the impedance Ze on the side of the power supply as observed from the semiconductor device
35
to the impedance Zc on the side of the bypass capacitor
37
as observed from the semiconductor device
35
is, the greater the effects of attenuating source noise for other semiconductor devices and electromagnetic radiation from the power supply/ground planes are.
With the above conventional construction, however, if the decoupling coil
41
is large, the impedance also increases at a low frequency, resulting in failure to supply a current required for the semiconductor device
35
from the power supply. In order to avoid this problem, it is required that the decoupling coil
41
be sufficiently small and that the bypass capacitor
37
be sufficiently close to the semiconductor device
35
for reducing parasitic inductance.
If the decoupling coil
41
and the bypass capacitor
37
are constructed as discrete elements, there arise problems such that elements with appropriate values are not obtainable and that the impedance Zc cannot be sufficiently made small due to parasitic inductance possessed by the bypass capacitor
37
. As a result, sufficient effects of attenuating source noise and electromagnetic radiation from the power supply/ground planes are not obtained.
Construction of discrete elements has other disadvantages as follows. The cost increases. The area required for implementation of these elements increases and thus reduction in size of the resultant device becomes difficult. With an increased size of the device, high-speed operation is not possible.
In a high-speed operating circuit, in general, each of the ground plane
43
and the power supply plane
42
is formed as an entire pattern on an inner layer of the substrate. The signal line
38
is formed so as to constitute a micro-strip line structure with the ground plane
43
formed on the first inner layer nearest to the signal line
38
among underlying inner layers of the substrate. Alternatively, the signal line
38
is formed so as to constitute a micro-strip line structure with the power supply plane
42
formed on the first inner layer among the underlying inner layers of the substrate as described above.
Herein, the former construction may also be referred to as the construction having the ground plane
43
right under the signal line
38
, whereas the latter construction may also be referred to as the construction having the power supply plane
42
right under the signal line
38
.
However, when the signal line
38
constitutes a micro-strip line structure with the power supply plane
42
in the construction shown in
FIG. 29
, the power supply plane
42
exists right under the signal line
38
. In this case, a feedback current of a current flowing to the output terminal
36
flows to the power supply plane
42
via the decoupling coil
41
. This increases the impedance and thus high-speed operation is not possible. For this reason, the construction shown in
FIG. 29
can be fabricated only on a surface of a substrate right under which the ground plane
43
exists, but not on a surface thereof right under which the power supply plane
42
exists.
As a result, in a high-speed operating circuit, implementation may be limited, or a longer interconnection route may be required for implementation. Otherwise, implementation itself may be impossible. Further, for these reasons, the following disadvantages arise. The cost increases. The area required for implementation increases and thus reduction in size of the resultant device becomes difficult. With an increased size of the device, high-speed operation is not possible.
As described above, the conventional semiconductor integrated circuit aims at reducing source noise and electromagnetic radiation by decoupling semiconductor circuits from each other with respect to high frequency using decoupling coils. However, the semiconductor integrated circuit has problems such that implementation is limited, the cost increases, the source impedance increases due to increase of an impedance component, the area for implementation increases, and high-speed operation becomes difficult.
SUMMARY OF THE INVENTION
An object of the present invention is to solve the above problems inherent in the conventional semiconductor integrated circuit and provide small and inexpensive electric circuit and semiconductor package capable of reducing source noise a

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