Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1996-06-27
2000-05-16
Abraham, Fetsum
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257314, 257315, 257348, 257349, 257350, H01L 2906
Patent
active
060640901
ABSTRACT:
On an insulating film a mesa-isolation silicon layer is formed, in which a channel region and source/drain regions are included. A gate insulating film and a conducting layer as a part of a gate electrode are stacked on the mesa-isolation silicon layer. A sidewall of an insulating material is formed on side surfaces of the mesa-isolation silicon layer, gate insulating film, and conducting layer at an end portion of the channel region of the mesa-isolation silicon layer, and a gate electrode is formed on the conducting layer.
REFERENCES:
patent: 4753986 (1988-06-01), Matloubian
patent: 5477073 (1995-12-01), Wakai et al.
patent: 5592008 (1997-01-01), Yamazaki et al.
patent: 5596205 (1997-01-01), Reedy et al.
patent: 5693549 (1997-12-01), Kim
patent: 5763904 (1998-06-01), Nakajima et al.
Ipposhi Takashi
Miyamoto Shoichi
Abraham Fetsum
Mitsubishi Denki & Kabushiki Kaisha
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