Surface analysis method and apparatus

Details Surface analysis method and apparatus Surface analysis method and apparatus

1990-01-03

1991-10-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250310, H01J 3700

Patent

active

050556797

ABSTRACT:
A method of and an apparatus for analyzing a surface are disclosed, in which the intensity profile of a probe beam at the surface of a sample is measured, the intensity distribution of a detection signal along the surface of the sample is measured by scanning the surface of the sample with the probe beam, and mathematical transformation is carried out for each of the measured intensity profile and the measured signal-intensity distribution, to make surface analysis with high resolution.

REFERENCES:
patent: 3814943 (1974-06-01), Baker et al.
patent: 3971939 (1976-07-01), Hoppe
patent: 4499540 (1985-02-01), Kowalski
patent: 4679946 (1987-07-01), Rosencwaig et al.
patent: 4758723 (1988-07-01), Wardell et al.
patent: 4788495 (1988-11-01), Plies
"Fundamentals of X-Ray Photo Emission Spectroscopy", Grunthaner, MRS Bulletin, 30, Sep. 1987, pp. 60-64.
"Photoelectron Spectromicroscopy", Beamson et al., Nature, vol. 290, Apr. 1981.

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