Energy dispersive X-ray analyzer

Details Energy dispersive X-ray analyzer Energy dispersive X-ray analyzer

1997-08-14

1999-05-11

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, 250399, 2505051, H01J37/244

Patent

active

059030046

ABSTRACT:
In an electron microscope employing an X-ray spectrometer according to the present invention, a collimator is provided in a head portion of the X-ray spectrometer and a part of the collimator is arranged in a leakage magnetic field of an objective lens included in the electron microscope, whereby the orbits of the scattering electrons are curved and hence the scattering electrons are prevented from colliding with the X-ray spectrometer to dissolve the background noises in the X-ray spectrum

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patent: 4803369 (1989-02-01), Otaka
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patent: 5065020 (1991-11-01), Kanda
patent: 5266802 (1993-11-01), Kasai
patent: 5289005 (1994-02-01), Naruse et al.

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