Method of making molds for manufacturing multiple-lead microstru

Details Method of making molds for manufacturing multiple-lead microstru Method of making molds for manufacturing multiple-lead microstru

1995-09-22

1997-07-08

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

205 70, 430967, C25D 110

Patent

active

056459777

ABSTRACT:
A method for making molds for use in manufacturing multiple-lead microstructures is disclosed. Each of the molds comprises a set of punch head molds and a set of matching die plate molds, and the method comprises the steps of (a) dividing the multiple-lead microstructure into a plurality of portions, each portion is to be prepared by a pair of a punch head, which contains a plurality of prutrusions, and a die plate, which contains a plurality of matching recesses; (b) preparing each of the punch head molds using a first lithographic technique; and (c) preparing each of the die plate molds using a second lithographic technique. The first lithographic technique comprises the steps of: (i) forming a thick layer of a photoresist on a baseplate; (ii) irradiating an x-ray of ultraviolet ray onto the photoresist via a first photomask; (iii) developing the photoresist to remove undesired portion thereof; (iv) electroplating a metal or metal-ceramic composite material onto the photoresist that has been developed; (v) removing the photoresist to form a micromold having recesses matching the portion of the microstructure to be prepared. The second lithographic technique involves the same steps except a second photomask, which is conjugate to the first photomask, is used.

REFERENCES:
patent: 5234571 (1993-08-01), Noekes
patent: 5298366 (1994-03-01), Iwasaki et al.

Affiliated with

Also associated with

Rating

Method of making molds for manufacturing multiple-lead microstru does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of making molds for manufacturing multiple-lead microstru, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making molds for manufacturing multiple-lead microstru will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2408163