Telescoping low vibration pulling mechanism for Czochralski crys

Details Telescoping low vibration pulling mechanism for Czochralski crys Telescoping low vibration pulling mechanism for Czochralski crys

1985-02-26

1987-05-05

Levy, Stuart S.

Rotary shafts, gudgeons, housings, and flexible couplings for ro

Coupling facilitates relative axial motion between coupled...

74 22R, 422249, F16D 306, B01D 900

Patent

active

046628606

ABSTRACT:
A telescoping low vibration pulling mechanism for use in Czochralski crystal growth apparatus, comprising a broached bushing which defines an internal circumference of teeth therein, which teeth cooperate with complimentary teeth defined on the circumference of a splined shaft. The bushing is coupled to a motor drive via a hollow tube and the splined shaft, couplable to a seed shaft and an elevation assembly, telescopes through said bushing within said hollow tube.

REFERENCES:
patent: 1636262 (1927-07-01), Troendly
patent: 1779805 (1930-10-01), Dunwoodie
patent: 2796767 (1957-06-01), Carpenter
patent: 3552931 (1971-01-01), Doherty et al.
patent: 3574374 (1971-04-01), Keller et al.
patent: 3802278 (1974-04-01), Loomans
patent: 3805552 (1974-04-01), Heald
patent: 4131420 (1978-12-01), Miller
patent: 4397055 (1983-08-01), Cuchiara

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