Method for forming carbonaceous films

Details Method for forming carbonaceous films Method for forming carbonaceous films

1991-07-15

1993-01-05

Jones, W. Gary

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156651, 134 1, C23F 100

Patent

active

051767910

ABSTRACT:
Cleaning a device to make a film made from carbon or containing carbon as a main ingredient is carried out by etching the interior of a deposition chamber where the film is formed, with an etching gas in a plasma state selected from the group of hydrogen, oxygen, and a gaseous fluoride, and then cleaning the interior of the deposition chamber with a cleaning gas selected from the group of argon and hydrogen in a plasma state.

REFERENCES:
patent: 4786352 (1988-11-01), Benzing
patent: 4797178 (1989-01-01), Bui
patent: 4816113 (1989-03-01), Yamazaki

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