Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1998-07-10
1999-12-28
Tran, Minh Loan
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257910, H01L 2976
Patent
active
060085223
ABSTRACT:
The structure of a buried bit line. A substrate is provided and a trench is, formed within the substrate. Next, a trench insulating layer is located on a portion of the trench surface to expose a top corner of the trench. Then, a first conductive layer is fills the trench and forms a surface. Afterwards, a second conductive layer is formed on the surface and fills the trench, wherein the second conductive layer makes contact with the top corner, and a shallow junction region is located at the top corner and makes contact with the second conductive layer.
REFERENCES:
patent: 5869863 (1999-02-01), Wen
patent: 5932909 (1999-08-01), Kato et al.
Hong Gary
Sheu Yau-Kae
Ting Wenchi
Tran Minh Loan
United Semiconductor Corp.
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