Transfer device for transferring a substrate

Details Transfer device for transferring a substrate Transfer device for transferring a substrate

1992-09-10

1994-12-20

Huppert, Michael S.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414750, 414774, 414936, B65G 4724

Patent

active

053741471

ABSTRACT:
A device for transferring a LCD substrate under a reduced pressure atmosphere comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is substantially horizontal, a multi-joint arm mechanism for mounting the LCD substrate on a second stage of a delivery position after moving the first stage in substantially horizontal plane, a mechanism for pushing the LCD substrate on the first and second stages, and for positioning the LCD substrate at a home position.

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patent: 5054991 (1991-10-01), Kato
patent: 5092557 (1992-03-01), Sawatzki
patent: 5102280 (1992-04-01), Poduje et al.
patent: 5147168 (1992-09-01), Suwa et al.

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