Semiconductor memory with trench capacitor

Details Semiconductor memory with trench capacitor Semiconductor memory with trench capacitor

1993-07-19

1994-10-18

Limanek, Robert

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257302, 257305, H01L 27108

Patent

active

053571312

ABSTRACT:
A semiconductor memory wherein a part of each capacitor is formed on side walls of an island region surrounded with a recess formed in a semiconductor substrate, and the island region and other regions are electrically isolated by the recess.

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