Vacuum processing system with turbo-axial fan in clean-air suppl

Details Vacuum processing system with turbo-axial fan in clean-air suppl Vacuum processing system with turbo-axial fan in clean-air suppl

1998-02-06

2000-04-18

Joyce, Harold

Ventilation

Clean room

553852, 414939, 454192, H01L 2100

Patent

active

060508914

ABSTRACT:
A turbo-axial fan assembly is provided for a clean-air supply system of a substrate handling module of a vacuum processing system. The turbo-axial fan assembly has one or more turbo-axial fans for generating airflow through the substrate handling environment. The turbo-axial fans have tunable vanes for controlling the speed of the airflow and efficiently using the available power.

REFERENCES:
patent: 4102656 (1978-07-01), Koritz
patent: 4986170 (1991-01-01), Ramakrishnan et al.
patent: 5003865 (1991-04-01), Traudt
patent: 5642978 (1997-07-01), Lahne et al.
patent: 5922095 (1999-07-01), Hustvedt et al.

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