Micromotors and methods of fabrication

Details Micromotors and methods of fabrication Micromotors and methods of fabrication

1994-06-06

1998-01-06

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430314, 430319, 216 2, 310 40MM, H02K 1502

Patent

active

057053189

ABSTRACT:
A polysilicon micromotor, of either inner rotor or outer rotor design, is fabricated with a process that uses as few as three mask steps. In an outer rotor (wobble) micromotor, a free-rotating insulating flange bearing mechanically couples the inner periphery of the rotor to the stator, permitting the outer periphery of the rotor to be directly coupled to other mechanisms. The dielectric constant of the flange bearing increases motive torque of the motor as contrasted with air-gap designs. This and other factors results in motive torque, in the illustrated embodiment, more than 100 times larger than in previous designs. Among its other benefits, the disclosed fabrication process results in in-place formation of all motor elements, and enables precise definition of the rotor/stator gap.

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