Semiconductor device manufacturing: process – Electron emitter manufacture
Patent
1999-03-01
2000-01-25
Niebling, John F.
Semiconductor device manufacturing: process
Electron emitter manufacture
445 49, 445 50, 445 51, H01L 2100
Patent
active
060177721
ABSTRACT:
A method of fabricating field emission arrays which employs a single mask to define emitter tips and their corresponding resistors. Column lines may also be defined without requiring the use of an additional mask. The method includes disposing substantially mutually parallel conductive lines onto a substrate of the field emission array. The conductive lines may be patterned from a layer of conductive material or selectively deposited onto the substrate. One or more material layers, from which the emitter tips and resistors will be defined, are disposed onto the conductive lines and the regions of substrate exposed between adjacent conductive lines. The exposed surface of the layer or layers of emitter tip and resistor material or materials may be planarized. A mask is disposed over the substanitially planar surface. The emitter tips and resistors are defined through the mask and substantially longitudinal center portions of the conductive lines exposed through the layer or layers of emitter tip and resistor material or materials. The substantially longitudinal center portions of the conductive lines may be removed in order to define column lines and to electrically isolate adjacent column lines from one another. A field emission array that has been fabricated in accordance with the method of the present invention is also within the scope of the present invention. Such a field emission array may include a substrate including resistors protruding, therefrom, column lines laterally adjacent the resistors, and one or more emitter tips disposed substantially above each of the resistors.
REFERENCES:
patent: 5229331 (1993-07-01), Doan et al.
patent: 5302238 (1994-04-01), Roe et al.
patent: 5312514 (1994-05-01), Kumar
patent: 5372973 (1994-12-01), Doan et al.
patent: 5374868 (1994-12-01), Tjaden et al.
patent: 5585301 (1996-12-01), Lee et al.
patent: 5633560 (1997-05-01), Huang
patent: 5637023 (1997-06-01), Itoh et al.
patent: 5641706 (1997-06-01), Tjaden et al.
patent: 5669801 (1997-09-01), Lee
patent: 5696385 (1997-12-01), Song et al.
patent: 5712534 (1998-01-01), Lee et al.
patent: 5735721 (1998-04-01), Choi
Micro)n Technology, Inc.
Niebling John F.
Zarneke David A
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