Hollow cathode type magnetron apparatus construction

Details Hollow cathode type magnetron apparatus construction Hollow cathode type magnetron apparatus construction

1988-11-21

1990-04-10

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20429816, 20429817, 20429819, 20429823, 20429824, C23C 1434

Patent

active

049158058

ABSTRACT:
A hollow cathode type inverted cylindrical magnetron apparatus construction comprises two separate units each having a rectangular C shape cross section. The two C shaped units are positioned together to form a hollow rectangular parallelpiped like cavity and articles to be sputtered are passed through this cavity.
Bolted construction of simple elements having simple geometry are used to produce a very inexpensive structure which is easily serviceable. This magnetron construction uses permanent magnets all having the same north south pole orientation located behind the target material and surrounded on three sides by magnetic permeable material to confine the magnetic flux path. Hence the lines of force tend to be parallel to the substrate surface of the article very near to that surface and heating of the substrate is minimized. Cooling is provided by coolant carrying tubes interspersed between the magnets and the target material.

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