Method of activating at least one gas to produce different charg

Details Method of activating at least one gas to produce different charg Method of activating at least one gas to produce different charg

1990-06-27

1992-03-10

Beck, Shrive

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427 42, 427 47, 427 531, 4272552, 4272555, B05D 306

Patent

active

050948792

ABSTRACT:
According to a thin film forming method, at least one type of gas is activated to produce a plurality of species having positive or negative charges. The plurality of species pass through an electric field or magnetic field to extract specific species. The specific species are supplied to a substrate surface. Thereafter, the specific species are chemically reacted with each other to form a thin film. This extraction is performed using a difference in track corresponding to a ratio of mass to charge of the species passing through the electric field.

REFERENCES:
patent: 4657774 (1987-04-01), Satou et al.

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