Surface treating method and apparatus therefor

Details Surface treating method and apparatus therefor Surface treating method and apparatus therefor

1993-11-10

1996-06-18

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

250281, 250283, 250489, 437946, H01L 21203

Patent

active

055277314

ABSTRACT:
A surface treating method of the invention comprises the steps of generating mixed chemical species containing an intended chemical species of ions necessary for surface treatment by ionization of a gas, selectively trapping the intended chemical species from the mixed chemical species, exciting the intended chemical species to predetermined vibrational and electronic states, extracting the excited chemical species from a position where trapped, and subjecting the extracted chemical species to surface treatment on a surface of an article to be treated. In this method, the intended chemical species of ions which are under vibrational and electronic conditions effective for the surface treatment and have a certain mass number have been once trapped at a given position. The trapped ions are uniformly arranged with respect to their translational velocity and applied to a sample surface. Thus, dry etching with high anisotropy and high selectivity to material and deposition with good uniformity can be realized.

REFERENCES:
patent: 5051582 (1991-09-01), Bahns et al.
patent: 5223711 (1993-06-01), Sanderson et al.

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