Scanning probe microscope and method of observing sample by usin

Details Scanning probe microscope and method of observing sample by usin Scanning probe microscope and method of observing sample by usin

1992-08-28

1994-06-21

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 73105, H01J 3726

Patent

active

053230035

ABSTRACT:
A scanning probe microscope is provided with a probe, a scanning device, a detecting device and an output device. The probe is disposed to face the surface of a sample. The scanning device two-dimensionally scans the surface of the sample using the probe. A signal corresponding to the structure of the sample is detected from the probe by the detecting device. From the signal detected in the detecting device, an observation image of the sample is output by the output device. The apparatus is further provided with a correcting device for correcting the scan by the scanning device so that the observation image output from the outputting device is not shifted.

REFERENCES:
patent: 5077473 (1991-12-01), Elings et al.
Binnig et al., "Scanning Tunneling Microscopy", Helvetica Physics Oeta, vol. 55, pp. 726-735 (1982).

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