Method for forming an ion implanted electrostatic chuck

Details Method for forming an ion implanted electrostatic chuck Method for forming an ion implanted electrostatic chuck

1998-12-03

2000-09-05

Leja, Ronald W.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

279128, 428195, H02N 1300

Patent

active

061152323

ABSTRACT:
The present invention provides a method for forming an electrostatic chuck. A chuck body is provided in which the chuck body includes an insulating layer. Metal is implanted into a surface of the chuck body, wherein a conductive layer of metal is formed within the insulating layer of the chuck body.

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