Probe card with plural probe tips on a unitary flexible tongue

Details Probe card with plural probe tips on a unitary flexible tongue Probe card with plural probe tips on a unitary flexible tongue

1997-04-14

2000-09-05

Snow, Walter E.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324 725, G01R 1073, G01R 3126

Patent

active

061148644

ABSTRACT:
A probe card comprises the following elements. An insulation film is provided which is flexible and extends on a first surface of a substrate. The insulation film has a first surface in contact with the first surface of the substrate, to form a space region which is defined between the first surface of the substrate and the first surface of the insulation film so as to allow part of the insulation film to move into the space. Probe patterns extend on a second surface of the insulation film so that the probe patterns.

REFERENCES:
patent: 3826984 (1974-07-01), Epple
patent: 4961052 (1990-10-01), Tada et al.
patent: 4968589 (1990-11-01), Perry
patent: 5134365 (1992-07-01), Okubo et al.
patent: 5172050 (1992-10-01), Swapp
patent: 5191708 (1993-03-01), Kasukabe et al.
patent: 5444386 (1995-08-01), Mizumura

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