Method of fabricating barium strontium titanate

Details Method of fabricating barium strontium titanate Method of fabricating barium strontium titanate

1995-06-07

1997-03-25

Lusignan, Michael

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

4271261, 427252, B05D 512

Patent

active

056142528

ABSTRACT:
A precursor liquid comprising barium and strontium 2-ethylhexanoates and titanium 2-methoxyethanol in a 2-methoxyethanol solvent is prepared, a substrate is placed within a vacuum deposition chamber, the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of barium strontium titanate on the substrate. Then an integrated circuit is completed to include at least a portion of the layered superlattice material film in a component of the integrated circuit.

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