Electron beam scanning method and scanning electron microscope

Details Electron beam scanning method and scanning electron microscope Electron beam scanning method and scanning electron microscope

1987-10-07

1988-12-13

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250346ML, 250307, H01J 37256

Patent

active

047912944

ABSTRACT:
Disclosed is an electron beam scanning method and a scanning electron microscope, wherein an electron beam scans an electrical insulation sample in reciprocative directions, with a time difference of n period(s) (n=0, 1, 2, . . . ) plus a half period of a.c. power or external a.c. magnetic field being provided between a scanning start time point in each scanning direction of the deflection magnetic field and a corresponding zero-cross point of the a.c. power or external magnetic field so as to reduce the sample shape measurement error caused by the difference of charging on the sample, thereby enhancing the accuracy of sample shape measurement.

REFERENCES:
patent: 3842272 (1974-10-01), Coates et al.
patent: 4554452 (1985-11-01), Suganuma

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