Si- and/or Ge-containing non-single crystalline semiconductor fi

Details Si- and/or Ge-containing non-single crystalline semiconductor fi Si- and/or Ge-containing non-single crystalline semiconductor fi

1994-01-31

1994-12-06

Mintel, William

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Amorphous semiconductor material

257 53, 257 55, 257 56, 257 57, 257 65, 257 62, 257 63, 257 66, 136258, H01L 4500

Patent

active

053713800

ABSTRACT:
A non-single crystalline semiconductor containing at least one kind of atoms selected from the group consisting of silicon atoms (Si) and germanium atoms (Ge) as a matrix, and at least one kind of atoms selected from the group consisting of hydrogen atoms (H) and halogen atoms (X), wherein said non-single crystalline semiconductor has an average radius of 3.5 .ANG. or less and a density of 1.times.10.sup.19 (cm.sup.-3) or less as for microvoids contained therein. The non-single crystalline semiconductor excels in semiconductor characteristics and adhesion with other materials and are effectively usable as a constituent element of various semiconductor devices.

REFERENCES:
patent: 4615298 (1986-10-01), Yamazaui
patent: 4698494 (1987-10-01), Kato et al.
Mahan et al., "Small Angle X-Ray Scattering from Microvoids in the A-SiCiH Alloy," IEEE Transactions on Electron Devices, vol. 36, No. 12, Dec. 1989, pp. 2859-2862.
Mahan et al., "Characterization of Microvoids in Device-Quality Hydrogenated Amorphous Silicon by Small-Angle X-Ray Scattering and Infrared Measurements,"Physical Review B, vol. 40, No. 17, 15 Dec. 1989, pp. 12024-12027.
Pankove, Ed., Semiconductors and Semimetals, vol. 21, Part C, Chapter 6, 1984, Academic Press, New York, pp. 207-237.

Affiliated with

Also associated with

Rating

Si- and/or Ge-containing non-single crystalline semiconductor fi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Si- and/or Ge-containing non-single crystalline semiconductor fi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Si- and/or Ge-containing non-single crystalline semiconductor fi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-216639