Method of automatically setting coordinate conversion factor

Details Method of automatically setting coordinate conversion factor Method of automatically setting coordinate conversion factor

1993-11-30

1995-08-22

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

H01J 3726

Patent

active

054442451

ABSTRACT:
A method of automatically setting a coordinate conversion factor in which, under the condition where a sample having a simple contour, such as a wafer with a known contour, is installed in a shape observing unit, in order to determine the conversion factor between a coordinate system defined by the contour of the sample and a control coordinate system for an observing position such as a stage coordinate system, the edge position of the contour of the sample is automatically recognized at a high accuracy from a secondary electron picture which has been obtained from the shape observing unit, from the result of which the conversion factor between the sample coordinate system and the stage coordinate system is automatically set.

REFERENCES:
patent: 4442361 (1984-04-01), Zasio et al.
patent: 4814682 (1989-03-01), Yamada
patent: 5172402 (1992-12-01), Mizusawa et al.
patent: 5208763 (1993-05-01), Hong et al.

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