Wafer pedestal with a purge ring

Details Wafer pedestal with a purge ring Wafer pedestal with a purge ring

1999-02-09

2000-12-12

Mills, Gregory

Coating apparatus

Gas or vapor deposition

118728, 156345, C23C 1600, H04H 100

Patent

active

061592994

ABSTRACT:
A wafer pedestal with a purge ring that circumscribes a peripheral edge of the wafer pedestal. The purge ring contains plurality of passages that are located proximate the peripheral edge of said wafer pedestal such that purge gas is directed towards the peripheral edge. Additionally, the purge ring cooperates with an edge ring assembly that circumscribes the purge ring. The purge ring and the edge ring assembly allow a dual-purge flow pattern to be established, which significantly reduces the accumulation of undesirable deposits upon the wafer pedestal.

REFERENCES:
patent: 4645218 (1987-02-01), Ooshio et al.
patent: 5213650 (1993-05-01), Wang et al.
patent: 5246881 (1993-09-01), Sandhu et al.
patent: 5262029 (1993-11-01), Erskine et al.
patent: 5356476 (1994-10-01), Foster et al.
patent: 5370709 (1994-12-01), Kobayashi
patent: 5370739 (1994-12-01), Foster et al.
patent: 5447570 (1995-09-01), Schmitz et al.
patent: 5486975 (1996-01-01), Shamouilian et al.
patent: 5494523 (1996-02-01), Steger et al.
patent: 5516367 (1996-05-01), Lei et al.
patent: 5556476 (1996-09-01), Lei et al.
patent: 5589224 (1996-12-01), Tepman et al.
patent: 5688331 (1997-11-01), Aruga et al.
patent: 5740009 (1998-04-01), Pu et al.
patent: 5748434 (1998-05-01), Rossman et al.
patent: 5766365 (1998-06-01), Umotoy et al.
patent: 5803977 (1998-09-01), Tepman et al.
patent: 5805408 (1998-09-01), Maraschin et al.
patent: 5851299 (1998-12-01), Cheng et al.
patent: 5888304 (1999-03-01), Umotoy et al.
patent: 5997651 (1999-12-01), Matsuse et al.

Affiliated with

Also associated with

Rating

Wafer pedestal with a purge ring does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer pedestal with a purge ring, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer pedestal with a purge ring will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-212496