Seal for a joint or juncture – Seal between relatively movable parts – Relatively rotatable radially extending sealing face member
Patent
1996-04-10
1999-03-23
Cuchlinski, Jr., William A.
Seal for a joint or juncture
Seal between relatively movable parts
Relatively rotatable radially extending sealing face member
277 34, 277 72R, 277236, 219390, 118733, F16J 1548
Patent
active
058849173
ABSTRACT:
Annular groove portions are formed in each of facing surfaces of a sealing portion of a processing vessel that is kept in an atmosphere of a prescribed gas or an atmosphere at a reduced pressure, and a thin annular plate is arranged in such a manner that it is sucked against the entire periphery of the opening portions of the annular groove portions. The annular groove portions are each connected to an exhaust device, and the facing surfaces of the sealing portion are sealed in a gas-tight manner by reducing the pressure in the annular groove portions so that the thin annular plate is sucked against the entire periphery of the openings of the annular groove portions. This configuration prevents the introduction of unwanted oxygen and moisture from the atmosphere into the interior of the processing vessel, and also provides a thermal processing apparatus which has a sealing portion that prevents the emission of gases and moisture at high temperatures.
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Beres John L.
Cuchlinski Jr. William A.
Tokyo Electron Tohoku Kabushiki Kaisha
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