Piezoelectric/electrostricitve element having ceramic substrate

Details Piezoelectric/electrostricitve element having ceramic substrate Piezoelectric/electrostricitve element having ceramic substrate

1995-05-19

1997-11-25

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, 310358, H01L 4108

Patent

active

056915942

ABSTRACT:
A piezoelectric/electrostrictive element including a thin ceramic substrate, and a piezoelectric/electrostrictive portion formed on the ceramic substrate by a film forming technique without an adhesive agent, the piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes and at least one piezoelectric/electrostrictive layer. The ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.

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