Piezoelectric/electrostrictive actuator having at least one piez

Details Piezoelectric/electrostrictive actuator having at least one piez Piezoelectric/electrostrictive actuator having at least one piez

1995-02-22

1997-11-25

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310330, 310332, 310324, 310363, 310346, H01L 4108

Patent

active

056915934

ABSTRACT:
A piezoelectric/electrostrictive actuator including a ceramic substrate, and at least one piezoelectric/electrostrictive actuator unit formed on at least a portion of at least one surface of the substrate, each piezoelectric/electrostrictive actuator unit having a first electrode film, a piezoelectric/electrostrictive film and a second electrode film which are laminated in the order of description, with the piezoelectric/electrostrictive actuator unit formed on the substrate by heat treatment.

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