Method for growing thin film by beam deposition and apparatus fo

Details Method for growing thin film by beam deposition and apparatus fo Method for growing thin film by beam deposition and apparatus fo

1990-05-18

1993-03-09

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156613, 156DIG64, 437106, 26415744, 26419225, C30B 2308

Patent

active

051923939

ABSTRACT:
A method for growing a thin film on a substrate of metal or ceramics by beam deposition comprising the steps of:

REFERENCES:
patent: 3847115 (1974-11-01), Tashbor
patent: 4227961 (1980-10-01), Takagi
patent: 4351856 (1982-09-01), Matsui et al.
patent: 4443488 (1984-04-01), Little et al.
patent: 4483725 (1984-11-01), Chang
patent: 4508609 (1985-04-01), Moustakas et al.
patent: 4572842 (1986-02-01), Dietrich et al.
Ben Shaul et al, Lasers and Chemical Change, Springes-Verlag New York, 1981, pp. 42-43.

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