Method of producing electroluminescence emitting film

Details Method of producing electroluminescence emitting film Method of producing electroluminescence emitting film

1995-05-12

1998-02-10

Breneman, R. Bruce

Chemistry: electrical and wave energy

Processes and products

Coating, forming or etching by sputtering

20419215, 20419225, 20419229, C23C 1434

Patent

active

057165017

ABSTRACT:
A method of making electroluminescence emitting films each containing sulfide such as Sr, Ca, etc. as a base material and a rare earth element such as Ce, Eu, Pr, etc. as an emitting center by sputtering method, so that the electroluminescence emitting film can produce with high luminance and with various emission light colors. In the method, an element such as Sr to be sulfidized for a base material is used as a target. A sputtering gas such as Argon to be supplied to a sputtering apparatus is mixed with an H.sub.2 S gas as a base material sulfur compound. A rare earth element compound such as tris-cyclopentadienyl-cerium for an emitting center is gasified by a gas generator while being heated under supply of a carrier gas such as Ar, so that the gasified rare earth element compound is added to the sputtering gas. In the above-mentioned condition, an electroluminescence emitting film is produced on a display panel by a high frequency sputtering method in a sputtering atmosphere of the sputtering gas containing sulfur for the base material and a rare earth element for the emitting center.

REFERENCES:
patent: 4025339 (1977-05-01), Kuehnle
patent: 4508610 (1985-04-01), Freeman et al.
patent: 4675092 (1987-06-01), Baird et al.
patent: 4725344 (1988-02-01), Yocum et al.
patent: 4770950 (1988-09-01), Ohnishi
patent: 4900584 (1990-02-01), Tuenge et al.
patent: 4967251 (1990-10-01), Tanaka et al.
patent: 5006365 (1991-04-01), Nire et al.

Affiliated with

Also associated with

Rating

Method of producing electroluminescence emitting film does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of producing electroluminescence emitting film, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of producing electroluminescence emitting film will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2074237