Scanning probe microscope and method for obtaining topographic i

Details Scanning probe microscope and method for obtaining topographic i Scanning probe microscope and method for obtaining topographic i

1996-10-11

1998-04-21

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324750, G01R 1100

Patent

active

057421722

ABSTRACT:
A scanning probe microscope used for obtaining a surface topographical image, a surface potential image and an electrostatic capacitance distribution includes a probe having a tip attached to a lever, an oscillator for oscillating the probe in close proximity to a specimen, a displacement detector for detecting the probe oscillations and outputting a displacement signal in accordance therewith, a positioning device for relative positioning of the probe tip with respect to the specimen in the X and Y directions and for controlling the distance between the probe tip and the specimen in the Z direction, an AC voltage source for applying an AC voltage between the probe to oscillate the probe at a composite frequency having components at .omega. and 2.omega., a DC voltage source for applying a DC voltage between the probe and the specimen to maintain the .omega. amplitude component of the probe oscillation at zero to enable the calculation of a surface potential of the specimen in accordance with the DC voltage and to enable the calculation of an electrostatic capacitance between the specimen and the probe in accordance with the 2.omega. amplitude component of the probe oscillation, and a display device responsive to the phase difference between an output of the oscillator and the displacement signal for indicating when the probe collides with the surface of the specimen.

REFERENCES:
patent: Re32457 (1987-07-01), Matey
patent: 4851671 (1989-07-01), Pohl
patent: 5065103 (1991-11-01), Slinkman et al.
patent: 5304924 (1994-04-01), Yamano et al.

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