Method of forming multiple-layer microlenses and use thereof

Details Method of forming multiple-layer microlenses and use thereof Method of forming multiple-layer microlenses and use thereof

1996-07-11

1999-02-16

Duda, Kathleen

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making named article

430330, 216 26, G03F 700

Patent

active

058718885

ABSTRACT:
A method of forming refractive microlenses which includes the steps of depositing or growing a first transparent layer on a substrate; depositing or growing a second transparent layer on the first transparent layer; forming a columnar structure in the second transparent layer; forming a pillar in the first transparent layer using the columnar structure as a mask, whereby the pillar is self-aligned under the columnar structure and the pillar has a cross-sectional area smaller than or equal to the cross-sectional area of the columnar structure; thereafter reflowing the second transparent layer of the columnar structure while the pillar remains essentially unaltered, whereby a structure is formed on top of the pillar, the structure having a ground plane with an area smaller than or equal to the original cross-sectional area of the columnar structure; and solidifying said structure. Due to the surface tension, the pillar underneath the microlens confines the reflow of the microlens to an area smaller or equal to the original cross-sectional area of the lens-forming columnar structure. A major effect of this is that the microlens has a strong curvature, and hence, a large numerical aperture.

REFERENCES:
patent: 4689291 (1987-08-01), Popovic et al.
patent: 5286605 (1994-02-01), Nishioka
patent: 5605783 (1997-02-01), Revelli
"A Process for Monolithic Fabrication of Microlenses on Integrated Circuits," Popovic, Z., SPIE, vol. 898 Optics and Lasers, pp. 23-25, 1988.
"Fabrication of Complex Micro-Optic Components using Photo-Sculpting through Halftone Transmission Masks," Purdy, D., Pure Appl. Opt. 3., pp. 167-175, 1994.
"Polymer Microlens Arrays," Pantelis, et al., Pure Appl. Opt. 3., pp. 103-108, 1994.
"Tolerancing of Arrays of Microlens Relays: A Case Study," Prince, et al., Pure Appl. Opt. 3, pp. 151-165, 1994.
"Microlenses fabricated by Melting a Photoresist on a Base Layer," Haselbeck, et al., Optical Engineering 32(6), pp. 1322-1324, 1993.

Affiliated with

Also associated with

Rating

Method of forming multiple-layer microlenses and use thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of forming multiple-layer microlenses and use thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of forming multiple-layer microlenses and use thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2060824