Heating – Heat generator heats gas or liquid material in a flow structure – With means utilizing the heated material for heating work
Patent
1996-07-09
2000-11-14
Dang, Thi
Heating
Heat generator heats gas or liquid material in a flow structure
With means utilizing the heated material for heating work
F26B 2100, F26B 300, F26B 1900
Patent
active
061461350
ABSTRACT:
Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressure in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultra rays on gases introduced to at least of the vessels.
REFERENCES:
patent: 3652331 (1972-03-01), Yamazari
patent: 4104086 (1978-08-01), Bonour
patent: 4149905 (1979-04-01), Levinstein
patent: 4409260 (1983-10-01), Pastor
patent: 4526624 (1985-07-01), Latta
patent: 4668337 (1987-05-01), Sekine et al.
patent: 4894353 (1990-01-01), Ibok
patent: 4901133 (1990-02-01), Curran
patent: 5108543 (1992-04-01), Suzuki et al.
patent: 5459105 (1995-10-01), Matsuura
patent: 5531857 (1996-07-01), Engelsberg et al.
Wolf et al, "Silicon Processing for the VLSI ERA", vol. 1, Lattice Press, Sunset Beach, CA (1986) p. 166.
Aoyama Shintaro
Imaoka Takashi
Konishi Nobuhiro
Morita Mizuho
Nakamura Masakazu
Dang Thi
Ohmi Tadahiro
Takasago Netsugaku Kogyo Kabushiki kaisha
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