Semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257401, H01L 2976, H01L 2362

Patent

active

058523189

ABSTRACT:
A semiconductor device includes: a plurality of first field effect transistors (FETs) having a gate formed on a main surface of a semiconductor substrate, and a drain and a source formed in regions on both sides of the gate; a plurality of second FETs having a gate formed on the main surface of the semiconductor substrate, and a drain and a source formed in regions on both sides of the gate; and an electrically conductive layer that penetrates the main surface and a back surface of the semiconductor substrate in a region between the pair of FETs; wherein the first and second FETs that form the pair of FETs are disposed close to each other so that their drains are opposite to each other; wherein region widths of the first and second FETs in a direction of shorter sides of sources thereof are substantially identical with region widths of the first and second FETs in a direction of shorter sides of drains thereof; wherein all the drains of the first and second FETs are electrically connected to each other; wherein all the gates of the first and second FETs are electrically connected to each other; and wherein all the sources of the first and second FETs are electrically connected to each other on the back surface of the semiconductor substrate through the conductive layer.

REFERENCES:
patent: 5449939 (1995-09-01), Horiguchi et al.
patent: 5652452 (1997-07-01), Asano
patent: 5703744 (1997-12-01), Jinda
patent: 5731614 (1998-03-01), Ham
Alan Wood et al., "High Performance Silicon LDMOS Technology For 2GHzRF Power Amplifier Applications", IEEE 1996, pp 4.2.1-4.2.4.
Gordon MA et al., "High Efficiency Submicron Gate LDMOS Power FET For Low Voltage Wireless Communications", IEEE 1997, pp 1303-1306.
Osamu Ishikawa et al., "A High-Power High-Gain VD-MOSFET Operating at 900 MHz", IEEE Transactions on Electron Devices, vol. ED-34, No. 5, May 1987, pp 1157-1161.

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