Combined slurry dispenser and rinse arm and method of operation

Details Combined slurry dispenser and rinse arm and method of operation Combined slurry dispenser and rinse arm and method of operation

1997-06-24

2000-10-31

Eley, Timothy V.

Abrading

Machine

Combined

451 28, 451283, 451287, 451288, 451444, B24B 700

Patent

active

061394068

ABSTRACT:
The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.

REFERENCES:
patent: 5154021 (1992-10-01), Bombardier et al.
patent: 5320706 (1994-06-01), Blackwell
patent: 5421768 (1995-06-01), Fujiwara et al.
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5531861 (1996-07-01), Yu et al.
patent: 5578529 (1996-11-01), Mullins
patent: 5616063 (1997-04-01), Okumura et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5738574 (1998-04-01), Tolles et al.

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