Susceptor structure for mounting processing object thereon

Details Susceptor structure for mounting processing object thereon Susceptor structure for mounting processing object thereon

1997-01-29

1998-12-22

Breneman, R.Bruce

Coating apparatus

Gas or vapor deposition

Work support

156345, 392418, 219464, C23C 1600

Patent

active

058512985

ABSTRACT:
A susceptor structure of the present invention comprising a susceptor main body having a mount surface mounting a processing object thereon, an upper side layer formed by sintering a first inorganic nonmetallic material having thermal conductivity, a lower side layer formed by sintering a second inorganic nonmetallic material having thermal conductivity lower than the first inorganic nonmetallic material, and an intermediate layer formed between the upper and lower side layers to be sintered to be combined with these layers such that the first and second inorganic nonmetallic materials are sintered in a mixing state of the first and second inorganic nonmetallic materials as its component ratio is transited, a cooling section for supporting the susceptor main body from the lower side to cool the susceptor main body, an electrostatic chuck, buried in the susception main body, for absorbing the processing object on the mount surface by Coulomb force, and heater, buried in the susception main body, for heating the processing object mounted on the mount surface.

REFERENCES:
patent: 4970375 (1990-11-01), Schittenhelm et al.
patent: 5306895 (1994-04-01), Ushikoshi et al.
patent: 5310993 (1994-05-01), McWilliams et al.
patent: 5456757 (1995-10-01), Aniga et al.
patent: 5490228 (1996-02-01), Soma et al.
patent: 5539179 (1996-07-01), Nozawa et al.
patent: 5562774 (1996-10-01), Breidenbach et al.
patent: 5566043 (1996-10-01), Kawada et al.

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