Embedded electroconductive layer and method for formation thereo

Details Embedded electroconductive layer and method for formation thereo Embedded electroconductive layer and method for formation thereo

1997-10-29

2000-07-18

Fahmy, Wael

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438653, 438656, 438687, 438688, 438720, H01L 214763

Patent

active

060907029

ABSTRACT:
An embedded electroconductive layer is disclosed which comprises an opening part or a depressed part 3 formed in an insulating film 2 on a substrate 1, a barrier layer for covering the opening part or the depressed part, a metal growth promoting layer 5 on the barrier layer, and an electroconductive layer 6 embedded in the opening part or the depressed part via the barrier layer 4 and the metal growth promoting layer 5.

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