Radiant energy – Inspection of solids or liquids by charged particles
Patent
1992-02-26
1993-09-14
Dzierzynski, Paul M.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 156647, 369126, G01B 528
Patent
active
052451879
ABSTRACT:
A microtip has a tip portion formed by gathering of three crystal faces of a single crystal, at least one of the crystal faces being an etched face at and around the tip portion. The microtip is produced by breaking and splitting a single crystal by applying a stress, and subjecting the face formed by breaking of the single crystal to anisotropic etching by utilizing facial orientation, thus forming a tip portion as a gathering point of three crystal faces of the single crystal. A surface-observing apparatus for observing a surface of a specimen and an information-treating apparatus comprise a tip in proximity to the specimen to be observed or a recording medium, and conduct the surface observation or the writing or reading by using the tip, respectively.
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Hatanaka Katsunori
Kawase Toshimitsu
Shinjo Katsuhiko
Takamatsu Osamu
Canon Kabushiki Kaisha
Dzierzynski Paul M.
Nguyen Kiet T.
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