Ferroelectric capacitive element

Details Ferroelectric capacitive element Ferroelectric capacitive element

1994-09-19

1995-11-28

Paschall, Mark H.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613211, 361303, H01G 4008

Patent

active

054713633

ABSTRACT:
A ferroelectric capacitive element according to the present invention includes a substrate constituted by a silicon oxide, glass, or the like, an adhesive layer of Ti or the like formed on the substrate, a lower electrode formed on the adhesive layer and constituted by any one of Pt, Pd, Ag, Au and the like, a ferroelectric film 14 formed on the lower electrode, a conductive oxide film formed on the ferroelectric film, and an upper electrode formed on the conductive oxide film and constituted by a metallic material other than precious metal, such as Al, Al alloy, AlSi, AlNi, Ni alloy, Cu alloy, AlCu.

REFERENCES:
patent: 5142437 (1992-08-01), Kammerdiner
patent: 5164808 (1992-11-01), Evans, Jr.
patent: 5293510 (1994-03-01), Takenaka
patent: 5368915 (1994-11-01), Ueda

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