Wafer boat

Details Wafer boat Wafer boat

1988-08-24

1991-01-01

Rose, Robert A.

Supports: racks

Special article

Platelike

118500, 118728, 211 13, 432253, 206454, B05C 1302

Patent

active

049812220

ABSTRACT:
Wafer supporting method and apparatus having at least two wafer supporting slots for each edge-wise oriented wafer in a plurality of coaxial edge-wise aligned wafers. The two wafer locations are essentially at the bottom and at an upper "side" i.e., slightly below the widest diameter dimension of and edge-wise wafer with a pair of spaced apart upper slots having the same loose fitting cross-sectional shape as the lower slot. The supported wafer at the upper location touches the slot support at one slot wall only. A cross sectional shape of the slots for each wafer includes: (a) a rounded bottom wafer-supporting wall having a diameter that is essentially the same as the wafer's thickness; (b) an angle-controlling side wall; and (c) a third gravity feed wall that joins the tight fitting bottom to a wide loose fitting wafer entry slot opening. Close spacing between adjacent slots is provided by a pair of slot walls that are parallel to each other and are at the wafer lean angle.

REFERENCES:
patent: 632876 (1899-09-01), Meaker
patent: 3433363 (1969-03-01), Clearman
patent: 3486631 (1969-12-01), Rodman
patent: 4355974 (1982-10-01), Lee
patent: 4505393 (1985-03-01), Fleigle
patent: 4738573 (1988-04-01), Johnson, Jr.
ASQ Angle Slotted Wafer Systems; ASQ Boats Inc, 2650 Walnut Ave. Tustin, Calif. .COPYRGT.1986.

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