Silicon single crystal pulling-up apparatus

Details Silicon single crystal pulling-up apparatus Silicon single crystal pulling-up apparatus

1991-04-22

1993-05-04

Straub, Gary P.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

1566171, 1566203, 156DIG70, 422248, C30B 3500, C30B 1510, C30B 2906

Patent

active

052079929

ABSTRACT:
A silicon single crystal pulling-up apparatus includes a silica glass crucible for accommodating a melted silicon material, a cylindrical member made of a carbon composite material which is composed of a carbon fiber wound round a cylinder, impregnated with a resin and carbonized, disposed on an upper end of a cylindrical portion of the crucible for accommodating the melted silicon in association with the cylindrical portion of the crucible, a wall thickness of the cylindrical member being not more than 3 mm, a rotational shaft for rotating the crucible, and a crucible support fixed to an upper end of the rotational shaft for supporting the crucible.

REFERENCES:
patent: 4198382 (1980-04-01), Matsui
patent: 4225569 (1980-09-01), Matsui et al.
patent: 4668481 (1987-05-01), Watanabe et al.
patent: 4686091 (1987-08-01), Washizuka et al.

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