Apparatus for automated loading of wafer cassette

Details Apparatus for automated loading of wafer cassette Apparatus for automated loading of wafer cassette

1998-06-03

2000-10-24

Bartuska, F. J.

Material or article handling

Vertically swinging load support

Grab

414940, 901 13, 901 49, B65G 4907, B25J 1906

Patent

active

061357022

ABSTRACT:
An apparatus for preventing the over-tilt of a gripper assembly in a cassette loading device is described. The apparatus provides an additional sensor arm system rigidly mounted to the gripper assembly such that the additional sensor arm not only provides a method for it to reach an over-tilt position, but also provides a mechanical stop to manually stop the gripper assembly from making further motion beyond the maximum downward-tilt position of the arm. The apparatus may further be provided with a warning system and a manual override device such that a machine operator may be alerted of the over-tilt condition and further, may manually override the sensor system by temporarily restoring power to the gripper assembly and returning it to a safe position.

REFERENCES:
patent: 4343584 (1982-08-01), Hudgins

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