Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent
1993-02-26
1993-11-16
Hart, Charles
Gas separation
With nonliquid cleaning means for separating media
Solid agent cleaning member movingly contacts apparatus
55271, 55385, 55472, 414187, 414217, B01D 4604
Patent
active
052619354
ABSTRACT:
A clean air apparatus includes a housing having an opening through which a carrier housing semiconductor wafers is supplied into the housing and an I/O port for supporting the carrier and a furnace for treating the wafer, provided in the upper portion of the housing. The carriers are at the same time supported by a first carrier stage provided in the upper portion of the housing and supported by a second carrier stage provided in the lower portion of the housing. The carrier or carriers are selectively moved between the I/O port and the first stage, between the I/O port and the second stage, and between the first stage and the second stage. A clean air is applied to the wafers in the carriers supported by the I/O port, the first stage and the second stage.
REFERENCES:
patent: 3944405 (1976-03-01), van Calsteren et al.
patent: 4693173 (1987-09-01), Saiki et al.
patent: 4832717 (1989-05-01), Peters
patent: 4923352 (1990-05-01), Tamuya et al.
patent: 5059079 (1991-10-01), Foulke et al.
patent: 5064337 (1991-11-01), Asakawa et al.
Abe Masaharu
Asano Takanobu
Ishii Katsumi
Moriya Syuji
Sakata Kazunari
Hart Charles
Tokyo Electron Sagami Limited
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