Clean air apparatus

Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

55271, 55385, 55472, 414187, 414217, B01D 4604

Patent

active

052619354

ABSTRACT:
A clean air apparatus includes a housing having an opening through which a carrier housing semiconductor wafers is supplied into the housing and an I/O port for supporting the carrier and a furnace for treating the wafer, provided in the upper portion of the housing. The carriers are at the same time supported by a first carrier stage provided in the upper portion of the housing and supported by a second carrier stage provided in the lower portion of the housing. The carrier or carriers are selectively moved between the I/O port and the first stage, between the I/O port and the second stage, and between the first stage and the second stage. A clean air is applied to the wafers in the carriers supported by the I/O port, the first stage and the second stage.

REFERENCES:
patent: 3944405 (1976-03-01), van Calsteren et al.
patent: 4693173 (1987-09-01), Saiki et al.
patent: 4832717 (1989-05-01), Peters
patent: 4923352 (1990-05-01), Tamuya et al.
patent: 5059079 (1991-10-01), Foulke et al.
patent: 5064337 (1991-11-01), Asakawa et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Clean air apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Clean air apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Clean air apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-19437

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.