Wafer carriage

Details Wafer carriage Wafer carriage

1996-02-23

1997-09-23

Gibson, Jr., Robert W.

Supports: racks

Special article

Platelike

206454, 118500, A47F 700

Patent

active

056695136

ABSTRACT:
A wafer carriage is disclosed. An edge of the wafer carriage is roundly formed so that an edge of the wafer when colliding against the wafer can be prevented from chipping, pads are provided to a guide on the upper side of the wafer carriage so that the wafer when moving can be prevented from sliding, and thus, the wafer chipping occurred in a successive process can be prevented.

REFERENCES:
patent: 4727993 (1988-03-01), Mirkovich et al.
patent: 5217341 (1993-06-01), Webber et al.
patent: 5219079 (1993-06-01), Nakamura
patent: 5255797 (1993-10-01), Kos
patent: 5351836 (1994-10-01), Mori et al.
patent: 5492229 (1996-02-01), Tanaka et al.
patent: 5534074 (1996-07-01), Koons

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