Method for forming a substantially uniform array of sharp tips

Details Method for forming a substantially uniform array of sharp tips Method for forming a substantially uniform array of sharp tips

1994-01-21

1995-02-21

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156646, 156654, 1566591, 1566611, 156662, 445 50, 445 51, H01J 900

Patent

active

053912594

ABSTRACT:
A method for forming a substantially uniform array of atomically sharp emitter tips, comprising: patterning a substrate with a mask, thereby defining an array; isotropically etching the array to form pointed tips; and removing the mask when substantially all of the tips have become sharp. A mask having a composition and dimensions which enable the mask to remain balanced on the apex of the tips until all of the tips are of substantially the same shape is used to form the array of substantially uniform tips.

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