Block polymer compositions

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430326, 430913, 430921, 430925, 522 31, 522 99, 522148, 5253265, 525337, 525340, 525479, G03C 1495, C08F 250, C08F 3008, C08F23008

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046892893

ABSTRACT:
Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis.

REFERENCES:
patent: 4307177 (1981-12-01), Crivello
patent: 4491628 (1985-01-01), Willson
patent: 4584356 (1986-04-01), Crivello

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