Induction plasma system

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating

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31323131, 315248, 31511151, 315357, 356316, H05H 130

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043061753

ABSTRACT:
An induction plasma system includes a plasma chamber, a high frequency electrical coil that surrounds the chamber, and an oscillator for energizing the coil to establish a plasma maintaining condition in the chamber. The oscillator tank circuit includes the coil, and is tuned so that it is essentially at resonance when a plasma condition is established in the chamber. Ignition means is arranged for initiating a plasma condition, and is constructed such that insertion of the ignition means into the chamber in the absence of a plasma condition shifts the impedance condition in the chamber to essentially the same tuned condition that exists when a plasma condition is established in the plasma chamber, but without need to adjust any component of the tank circuit.

REFERENCES:
patent: 3296410 (1967-01-01), Hedger
patent: 3353060 (1967-11-01), Yamamoto et al.
patent: 3401302 (1968-09-01), Thorpe et al.
patent: 3501675 (1970-03-01), Cleaver et al.
patent: 3530334 (1970-09-01), Thorpe et al.
patent: 3569777 (1971-03-01), Beaudry
patent: 3958883 (1976-05-01), Turner
patent: 4002944 (1977-01-01), McNeill et al.
Allemand et al., Design of a Fixed-Frequency Impedance Matching Network, etc., Spectrochim Acta, vol. 33B, 1978, pp. 513-534.

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