Electrical contacts for an electro-optic modulator

Details Electrical contacts for an electro-optic modulator Electrical contacts for an electro-optic modulator

1992-05-28

1993-10-12

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156665, C23F 100

Patent

active

052521800

ABSTRACT:
A contact structure and method of formation of a contact structure for an electro-optic modulator. Linear electrodes on a modulator crystal are covered with a dielectric layer. The electrodes are contacted by way of one or more vias through the dielectric layer. Contact pads are formed over the vias so as to contact the electrode and extend over several adjacent electrodes, providing significantly greater contact area for a driver chip applied to the modulator crystal.

REFERENCES:
patent: 4367925 (1983-01-01), Sprague et al.
patent: 4369457 (1983-01-01), Sprague
patent: 4391490 (1983-07-01), Hartke
patent: 4712857 (1987-12-01), Lee
patent: 4718752 (1988-01-01), Sprague et al.
patent: 4742023 (1988-05-01), Hasegawa
patent: 4861425 (1989-08-01), Greer et al.
patent: 4914054 (1990-04-01), Moriyama et al.
patent: 4948754 (1990-08-01), Kondo et al.
Sprague et al., "Linear total internal reflection spatial light modulator for laser printing," SPIE, vol. 299, 1982.

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