Specially doped precursor solutions for use in methods of produc

Details Specially doped precursor solutions for use in methods of produc Specially doped precursor solutions for use in methods of produc

1994-09-08

1996-05-14

Brunsman, David

Compositions: coating or plastic

Coating or plastic compositions

Heavy metal compound containing

10628719, C09D 400

Patent

active

055163637

ABSTRACT:
Metal doping agents are introduced into metal polyoxyalkylated liquid precursor solutions for use in processes for forming thin-layer capacitors (10) to be used in integrated circuits such as DRAMS and the like. The dopants serve to reduce capacitor leakage current by altering a dominant type of electron emission, as determined by a change in the slope of a line plotted as leakage current versus bias voltage. The specially doped precursor solutions preferably include mixtures of Ce, Cr, Dy, Mn, and Ti moieties.

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